Apertures

ARC possesses the machining equipment and skill to fabricate a wide variety of apertures in a similarly wide variety of materials.  The aspect ratio of aperture opening to material thickness is generally limited to a 20:1 aspect ratio.  Shown on the right in Figure 1 is an aperture with a wide series of holes ranging from 15 µm to 960 µm.

Aperture construction varies from a free-standing foil aperture where the aperture holes range from tens of nanometers to millimeters and material thicknesses range from sub-micron foil to tens of millimeters.

Figure 2 (right) illustrates a 30 nm thin foil with a 5 nm diameter hole.  This was accomplished with proprietary techniques.

Figure 1  The aperture above is fabricated using different machining techniques
Figure 1 The aperture above is fabricated using different machining techniques
Figure 2  5 nm dia. x 30 nm depth in Silicon Nitride (SEM)
Figure 2 5 nm dia. x 30 nm depth in Silicon Nitride (SEM)

All apertures are characterized using the most appropriate measurement instrument including SEM.

Drawings and sketches may be submitted through our contact page.  You will be contacted shortly to discuss your project. You may also call 651-789-9003 to speak to Marlow Roberts who leads ARC’s Ultra Machining Fab.

Also see ARC’s world renowned Focused Ion Beam Aperture strips at www.arcapertures.com or select Products/Apertures above. Cf. Figure 8 below.

Figure 3  15 µm thru 50 µm Molybdenum
Figure 3 15 µm thru 50 µm Molybdenum
Figure 4 9.7 µm Dia. thru 50 µm of Molybdenum
Figure 4 9.7 µm Dia. thru 50 µm of Molybdenum
Figure 5  Molybdenum FIB Aperture
Figure 5 Molybdenum FIB Aperture
Figure 6  200 µm in Silicon Carbide (SiC), 750 µm center to center, 600 µm deep
Figure 6 200 µm in Silicon Carbide (SiC), 750 µm center to center, 600 µm deep
Figure 7 80 µm Square Hole with a 1.34 µm Corner radius thru 25 µm of Molybdenum
Figure 7 80 µm Square Hole with a 1.34 µm Corner radius thru 25 µm of Molybdenum
Figure 7 (continued) Corner Detail
Figure 7 (continued) Corner Detail
Figure 8 Portion of a Standard FIB Apertures Strip in Molybdenum
Figure 8 Portion of a Standard FIB Apertures Strip in Molybdenum
Figure 9 500 µm holes in SiC 750 µm Center to Center, 3.1 mm Deep
Figure 9 500 µm holes in SiC 750 µm Center to Center, 3.1 mm Deep
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