Apertures

ARC possesses the machining techniques, skill and equipment to fabricate a wide variety of apertures in a similarly wide variety of materials. The aspect ratio of aperture opening to material thickness is generally limited to a 1:20 ratio.  Shown on the right in Figure 1 is an aperture with a wide series of holes ranging from 15um to 960um.

Aperture construction varies from a free-standing sheet aperture where the aperture holes range from tens of nanometers to millimeters and material thicknesses range from sub-micron foil to tens of millimeters.Figure 2 (right) illustrates a 30nm thin foil with a 5nm diameter hole. ARC used its ultra machining techniques and then verified the dimensions using our in-house Scanning Electron Microscope (SEM)

Figure 1  The aperture above is fabricated using different machining techniques
Figure 1 The aperture above is fabricated using different machining techniques
Figure 2  5 nm dia. x 30 nm depth in Silicon Nitride (SEM)
Figure 2 5 nm dia. x 30 nm depth in Silicon Nitride (SEM)

Figure 2 (right) illustrates a 30nm thin foil with a 5nm diameter hole. ARC used its ultra machining techniques and then verified the dimensions using our in-house Scanning Electron Microscope (SEM)

All apertures are characterized using the most appropriate measurement instrument including our SEM as illustrated below.

Drawings and sketches may be submitted through our contact page, or call 651-789-9003 to speak to Marlow Roberts who leads ARC’s Ultra Machining Fab.

Also see ARC’s world-renowned Focused Ion Beam Aperture strips at: www.arcapertures.com, select Products/Apertures above, or contact Chris Wurst at 651-789-9000. Cf. Figure 8 below.

Figure 3  15 µm thru 50 µm Molybdenum
Figure 3 15 µm thru 50 µm Molybdenum
Figure 4 9.7 µm Dia. thru 50 µm of Molybdenum
Figure 4 9.7 µm Dia. thru 50 µm of Molybdenum
Figure 5  Molybdenum FIB Aperture
Figure 5 Molybdenum FIB Aperture
Figure 6  200 µm in Silicon Carbide (SiC), 750 µm center to center, 600 µm deep
Figure 6 200 µm in Silicon Carbide (SiC), 750 µm center to center, 600 µm deep
Figure 7 80 µm Square Hole with a 1.34 µm Corner radius thru 25 µm of Molybdenum
Figure 7 80 µm Square Hole with a 1.34 µm Corner radius thru 25 µm of Molybdenum
Figure 7 (continued) Corner Detail
Figure 7 (continued) Corner Detail
Figure 8 Portion of a Standard FIB Apertures Strip in Molybdenum
Figure 8 Portion of a Standard FIB Apertures Strip in Molybdenum
Figure 9 500 µm holes in SiC 750 µm Center to Center, 3.1 mm Deep
Figure 9 500 µm holes in SiC 750 µm Center to Center, 3.1 mm Deep
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