MEMs Devices

Design and Fab

DRIE, Front Side and Back Side Lithography

Mask Design, GDS 2 Files

CAD to Fab to Packaging

Curved Channel CAD
Curved Channel CAD
Collimator Fab
Collimator Fab
Collimator Transmission
Collimator Transmission

Ion Spectrometer Project

CAD to Process Design & Development to Prototypes

Curved Channel Plate CAD
Curved Channel Plate CAD
SEM Curved Channels
SEM Curved Channels
Front  Back Channel Leads
Front Back Channel Leads
MEMs Chip Stack CAD
MEMs Chip Stack CAD
Stacked Chips
Stacked Chips
Channels
Channels
Gold Leads On Surface
60 micron Fins
360 micron tall
Gold Leads On Surface 60 micron Fins 360 micron tall
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