MEMs Devices

Design and Fab

DRIE, Front Side and Back Side Lithography

Mask Design, GDS 2 Files

CAD to Fab to Packaging

Curved Channel CAD
Collimator Fab
Collimator Transmission

Ion Spectrometer Project

CAD to Process Design & Development to Prototypes

Curved Channel Plate CAD
SEM Curved Channels
Front Back Channel Leads
MEMs Chip Stack CAD
Stacked Chips
Gold Leads On Surface 60 micron Fins 360 micron tall