MEMs Devices

Design and Fab

DRIE, Front Side and Back Side Lithography

Mask Design, GDS 2 Files

CAD to Fab to Packaging

Curved Channel CAD
Collimator Fab
Collimator Transmission

Ion Spectrometer Project

CAD to Process Design & Development to Prototypes

Curved Channel Plate CAD
SEM Curved Channels
Front Back Channel Leads
MEMs Chip Stack CAD
Stacked Chips
Channels
Gold Leads On Surface 60 micron Fins 360 micron tall