ARC has been working on small MEMS types of devices for several years based on winning several NASA and DOE SBIR’s. Shown below is the approximately 1.2 cm3 patented Micro Ion Spectrometer (MIS) project. The MIS is comprised of three MEMS components: the Collimator, Energy Analyzer, and Detector. The project is in cooperation with the West Virginia University and the Goddard Space Flight Center. The concept is applicable to Fusion Energy Plasma Diagnostics and Ionospheric Studies, due to its small size, it is planned to be aboard numerous micro satellites. A commercial application exists as well for plasma processing diagnostics.