Semiconductor Tooling

ARC specializes in custom tooling for the Semiconductor Industry, notably Vacuum Paddles, End Effectors, Ion Mill Grids, Silicon Tools, Deposition Shadow Masks and ARC’s own patented Wafer Etch Tool System.

Wafer Handling Tools

Shown in figure 1 is a typical paddle in stainless steel with its vacuum port shown in figure 2. Drawings and sketches may be emailed to arcinformation@arcnano.com  you will be contacted shortly to discuss your project.

Figure 1 Wafer Paddle
Figure 1 Wafer Paddle
Figure 2 Vacuum Hole
Figure 2 Vacuum Hole
Figure 3 End Effector
Figure 3 End Effector

Ion Mill Grids

ARC’s precision machining group will fabricate your obsolete or custom grid. Simply send an email to arcinformation@arcnano.com for a quote.

You can also send an old grid to ARC for a quote. New CAD/CAM files will be generated for fabrication. Your old grid will be returned along with your new part.

Figure 4 ARC Ion Mill Grid
Figure 4 ARC Ion Mill Grid

Silicon Tooling

Machining materials such as Aluminum Oxide, Silicon Carbide, Silicon, and ceramics is an ARC specialty. Shown on the right is a 2″ x 2″ chip holder fabricated from silicon wafer stock.

Figure 5 Silicon Chip Holder

Precision Sputter Shadow Masks

Often a project has a requirement to deposit a think film on specific areas of a part or chip, leaving other areas uncoated and where photoresist is not optimal. ARC possesses the equipment and knowledge to fabricate ultra-precise engineered masks for specialized applications.

Figure 6 Very High Precision Sputter Mask

Wafer Etching Tool System

ARC’s Patented Wafer Etch Tool Assembly for MEMS is shown at the right. The tool allows a 4″/100mm wafer to be etched on one side while the obverse and edge are protected from the etchant. To accomplish this protection, the wafer is “pinched” between one or more O-rings on each side as shown below in figure 8 in the expanded view for loading.

The ARC tool assembles with a flexture key system (screw-less) which uses a bar wrench to secure the locking  mechanism. The benchtop loading ficture and locking/unlocking wrench are showin in figure 9. 

Wafer Etch Tool with Wafer
Figure 7 Assembled Etch Tool with Wafer
Figure 8 Wafer Etch Tool Disassembled
Figure 8 Wafer Etch Tool Disassembled
Figure 9 Wafer Etch Tool Holding Fixture and Wrench
Figure 9 Wafer Etch Tool Holding Fixture and Wrench