SiC Vacuum Chucks
Arcnano manufacturers SiC Vacuum Chucks for Infra Red Focal Plane Array hybridization process where the ROIC chip is bonding to the detector chip.
Most of these chucks are for FC-150 and FC-300 device hybridization tools made by SET in France, formerly a division of Suss Microtec.
We supply chucks with sub micron flatness and parallelism. We use a Tropel Flatmaster for measurement of flatness and a Zygo NexView for measurement of surface roughness.
SiC Pedestal Chuck
